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1

Properties of AlN grown by plasma enhanced atomic layer deposition

Markus Bosund, Timo Sajavaara, Mikko Laitinen, Teppo Huhtio, Matti Putkonen, Veli-Matti Airaksinen, Harri Lipsanen

Journal:

Applied Surface Science

Year:

2011

Language:

english

File:

PDF, 999 KB

english, 2011

2

Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensors

Antti J. Niskanen, Aapo Varpula, Mikko Utriainen, Gomathi Natarajan, David C. Cameron, Sergey Novikov, Veli-Matti Airaksinen, Juha Sinkkonen, Sami Franssila

Journal:

Sensors and Actuators B: Chemical

Year:

2010

Language:

english

File:

PDF, 916 KB

english, 2010

3

Handbook of Silicon Based MEMS Materials and Technologies || Silicon Wafer and Thin Film Measurements

Airaksinen, Veli-Matti

Year:

2015

Language:

english

File:

PDF, 525 KB

english, 2015

4

ATOMIC LAYER DEPOSITION HfO 2 FILM USED AS BUFFER LAYER OF THE Pt/(Bi 0.95 Nd 0.05 )(Fe 0.95 Mn 0.05 )O 3 /HfO 2 /Si CAPACITORS FOR FeFET APPLICATION

XIE, DAN, FENG, TINGTING, LUO, YAFENG, HAN, XUEGUANG, REN, TIANLING, BOSUND, MARKUS, LI, SHUO, AIRAKSINEN, VELI-MATTI, LIPSANEN, HARRI, HONKANEN, SEPPO

Journal:

Journal of Advanced Dielectrics

Year:

2011

Language:

english

File:

PDF, 729 KB

english, 2011

5

SPIE Proceedings [SPIE Semi - DL tentative - San Diego, CA (Thursday 1 March 1990)] Modulation Spectroscopy - Photoreflectance studies of InGaAs/InP superlattices

Airaksinen, Veli-Matti, Lipsanen, Harri K., Ravila, P., Tuomi, Turkka O., Claxton, P. A., Pollak, Fred H., Cardona, Manuel, Aspnes, David E.

Year:

1990

Language:

english

File:

PDF, 226 KB

english, 1990

6

SPIE Proceedings [SPIE Semi - DL tentative - San Diego, CA (Thursday 1 March 1990)] Modulation Spectroscopy - Study of GaAs/AlGaAs and InGaAs/InP quantum well structures using low-field transverse electroreflectance

Lipsanen, Harri K., Airaksinen, Veli-Matti, Tuomi, Turkka O., Claxton, P. A., Pollak, Fred H., Cardona, Manuel, Aspnes, David E.

Year:

1990

Language:

english

File:

PDF, 288 KB

english, 1990

7

Handbook of Silicon Based MEMS Materials and Technologies || Silicon Wafer and Thin Film Measurements

Airaksinen, Veli-Matti

Year:

2010

Language:

english

File:

PDF, 894 KB

english, 2010

8

Orientation and Boron Concentration Dependence of Si Layer Transfer by Mechanical Exfoliation

Henttinen, Kimmo, Suni, Tommi, Nurmela, Arto, Airaksinen, Veli-Matti, Suni, Ilkka, Lau, S.S

Journal:

MRS Proceedings

Year:

2001

Language:

english

File:

PDF, 70 KB

english, 2001

9

[IEEE 2011 International Conference of Electron Devices and Solid-State Circuits (EDSSC) - Tianjin, China (2011.11.17-2011.11.18)] 2011 IEEE International Conference of Electron Devices and Solid-State Circuits - Nd-doped Bismuth Titanate based ferroelectric field effect transistor: Design, fabrication, and optimization

Feng, Tingling, Xie, Dan, Zang, Yongyuan, Wu, Xaio, Luo, Yafeng, Ren, Tianling, Bosund, Markus, Li, Shuo, Airaksinen, Veli-Matti, Lipsanen, Harri, Honkanen, Seppo

Year:

2011

File:

PDF, 509 KB

2011

10

Handbook of Silicon Based MEMS Materials and Technologies || Introduction to Measuring MEMS

Airaksinen, Veli-Matti

Year:

2015

Language:

english

File:

PDF, 66 KB

english, 2015

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